Canon announced that it will release the “Grade10” capacity upgrade kit (hereinafter referred to as the “Grade10” upgrade kit for the KrF semiconductor lithography machine “FPA-6300ES6a” in early August 2022.
JOIN US ON TELEGRAM
According to reports, the KrF semiconductor lithography machine “FPA-6300ES6a” has gained a good reputation among large-scale semiconductor device manufacturers producing memory and logic circuits since its release.
The newly released “Grade10” upgrade package enables high-efficiency production of 300 wafers per hour based on the 300mm wafer specification. In addition, this upgrade package will be available in 2023 on 200mm compatible devices of the KrF semiconductor lithography machine “FPA-6300ES6a”.
Moreover, the “Grade10” upgrade package shortens the exposure time and transfer time by speeding up the drive of the worktable and transfer system, and achieves a higher level of production in the semiconductor lithography industry with a production capacity of 300 wafers per hour.
At the same time, this is the first time Canon has installed an artificial neural network-based stage control system on semiconductor lithography equipment , which reduces vibration caused by high-speed driving and maintains high-precision lithography standards. In addition, by selecting overlay accuracy (Overlay) accessories, while increasing productivity, overlay accuracy up to 4nm can be achieved.
